Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
| Line 43: | Line 43: | ||
'''Other etch processes''' | '''Other etch processes''' | ||
*[[Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch|Nanostructure etches]] | *[[Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch|Nanostructure etches including nano1.42]] | ||
*[[Specific Process Knowledge/Etch/DRIE-Pegasus/DUVetches|Etch processes with DUV masks]] | *[[Specific Process Knowledge/Etch/DRIE-Pegasus/DUVetches|Etch processes with DUV masks]] | ||