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Specific Process Knowledge/Thin film deposition/ALD Picosun R200/ALD multilayers: Difference between revisions

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<gallery caption="" widths="1000px" heights="1000px" perrow="1">
<gallery caption="" widths="1000px" heights="1000px" perrow="1">
image:Al2O3_TiO2_flat_multilayers.jpg| Al<sub>2</sub>O<sub>3</sub>/TiO<sub>2</sub> multilayers grown on silicon trenches.
image:Al2O3_TiO2_flat_multilayers.JPG| Al<sub>2</sub>O<sub>3</sub>/TiO<sub>2</sub> multilayers grown on silicon trenches.


</gallery>
</gallery>
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