Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
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The process flow for a standard e-beam exposure on CSAR with Al on top can be found here [[media:Process Flow CSAR with Al.docx|Process Flow CSAR with Al]]. | The process flow for a standard e-beam exposure on CSAR with Al on top can be found here [[media:Process Flow CSAR with Al.docx|Process Flow CSAR with Al]]. | ||
= Literature on E-beam Lithography = | |||
* Handbook of Microlithography, Micromachining, and Microfabrication, Volume 1: Microlithography, P. Rai-Choudhury (Editor), chapter 2 (p 139 – 250). Link to book can be found here: http://www.cnf.cornell.edu/cnf_spietoc.html | * Handbook of Microlithography, Micromachining, and Microfabrication, Volume 1: Microlithography, P. Rai-Choudhury (Editor), chapter 2 (p 139 – 250). Link to book can be found here: http://www.cnf.cornell.edu/cnf_spietoc.html | ||
* Lithography, Wiley, 2011: Chapter 3, Electron Beam Lithography by Stefan Landis: http://onlinelibrary.wiley.com/doi/10.1002/9781118557662.ch3/summary | * Lithography, Wiley, 2011: Chapter 3, Electron Beam Lithography by Stefan Landis: http://onlinelibrary.wiley.com/doi/10.1002/9781118557662.ch3/summary | ||