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Specific Process Knowledge/Pattern Design: Difference between revisions

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If you have a Mac or Linux computer look [[/CleWin#Working with a Mac or Linux computer |here]].
If you have a Mac or Linux computer look [[/CleWin#Working with a Mac or Linux computer |here]].


For E-beam lithography and laser cutting you need to save your layout in the right file format before loading it to the equipment computer.
 
For E-beam lithography the layout file has to be saved as a DXF
 
For laser cutting the layout file has to be saved as a DXF file that is uploaded to the tools computer. For more details see [[Specific_Process_Knowledge/Back-end_processing/Mask_making|Mask Making on the Laser Micro Machining Tool]].
 
For UV-lithography and DUV-lithography it is necescary to have a physical masks produced based on the layout file.