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Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
7,317 edits
Bghe (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
7,317 edits
Line 64: Line 64:
| H<sub>2</sub>: 0-30 sccm
| H<sub>2</sub>: 0-30 sccm
|-
|-
| CH<sub>4</sub>: 0-50 sccm
| CH<sub>4</sub>: not working
| BCl<sub>3</sub>: 0-100 sccm
| BCl<sub>3</sub>: 0-100 sccm
|-
|-
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