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Specific Process Knowledge/Thermal Process/Dope with Phosphorus: Difference between revisions

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Kabi (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
1,142 edits
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==Doping profile results after phosphorous predeposition process==
==Test of the Phosphorus Predep furnace==


====1. Process parameters====
====1. Process parameters====
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"Result from GreenBelt, @Danchip,Jan 2015"
"Result from GreenBelt, @Danchip,Jan 2015"


====2. Process parameters====
====2. Test of the Phosphorus Predep furnace====


'''Substrate:''' p-type Si(100,)  
'''Substrate:''' p-type Si(100,)  
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