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Specific Process Knowledge/Thermal Process/Dope with Phosphorus: Difference between revisions

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Kabi (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
1,146 edits
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''Result from Trine Holm Christensen, @Space, Feb. 2015''
''Result from Trine Holm Christensen, @Space, Feb. 2015''
====Process parameters====
POCL1000 for 15 min, no anneal
WET1050 for 30 min in Furnace(A3)
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