Specific Process Knowledge/Thermal Process/Dope with Phosphorus: Difference between revisions
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One wafer from Jan2015 was analyzed with SIMS and the profiled is shown on the graph below: | One wafer from Jan2015 was analyzed with SIMS and the profiled is shown on the graph below: | ||
[[image:Phosphorus_doping2015.jpg| | [[image:Phosphorus_doping2015.jpg|400x600px|left|thumb|SIMS Measurement After Pre-dep, before and after oxidation respectively]] | ||
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''Result from Trine Holm Christensen, @Space, Feb. 2015'' | ''Result from Trine Holm Christensen, @Space, Feb. 2015'' | ||