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Specific Process Knowledge/Lithography/PMMA: Difference between revisions

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|-style="background:silver; color:black"
|-style="background:silver; color:black"
!Spin Speed [rpm]
!Spin Speed [rpm]
!Acceleration [1/s2]
!Acceleration [rpm/s]
!Thickness [nm]
!Thickness [nm]
!St Dev
!St Dev
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|-style="background:silver; color:black" style="text-align:left;"  
|-style="background:silver; color:black" style="text-align:left;"  
!Spin Speed [rpm]
!Spin Speed [rpm]
!Acceleration [1/s2]
!Acceleration [rpm/s]
!Thickness [nm]
!Thickness [nm]
!St Dev
!St Dev
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