Specific Process Knowledge/Lithography/PMMA: Difference between revisions
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| [http://www.allresist.com AllResist] | | [http://www.allresist.com AllResist] | ||
|We have various types of PMMA in the cleanroom. Please contact [mailto:Lithography@danchip.dtu.dk Lithography] for information. | |We have various types of PMMA in the cleanroom. Please contact [mailto:Lithography@danchip.dtu.dk Lithography] for information. | ||
| [[media:MSDS PMMA.pdf|MSDS PMMA]] [[media:AR-P631_679.pdf|Processing guidelines]] | | [[media:MSDS PMMA.pdf|MSDS PMMA]], [[media:AR-P631_679.pdf|Processing guidelines]] | ||
|See table <u>[[Specific_Process_Knowledge/Lithography/Coaters#Coaters:_Comparison_Table|here]] </u> | |See table <u>[[Specific_Process_Knowledge/Lithography/Coaters#Coaters:_Comparison_Table|here]] </u> | ||
|Anisole | |Anisole | ||
|MIBK:IPA (1:3), IPA: | |MIBK:IPA (1:3), H20:IPA (1:3) | ||
|IPA | |IPA | ||
|acetone/1165 | |acetone/1165 | ||