Specific Process Knowledge/Thin film deposition/Deposition of Alumina: Difference between revisions
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==Deposition of aluminium oxide== | ==Deposition of aluminium oxide== | ||
Aluminium oxide (Alumina, Al<sub>2</sub>O<sub>3</sub> ) can be deposited by use of ALD (atomic layer deposition) or by a sputter technique in the [[Specific Process Knowledge/Thin film deposition/Lesker|Lesker Sputter System]]. | Aluminium oxide (Alumina, Al<sub>2</sub>O<sub>3</sub> ) can be deposited by use of ALD (atomic layer deposition) or by a sputter technique in the [[Specific Process Knowledge/Thin film deposition/Lesker|Lesker Sputter System]] or the [[Specific Process Knowledge/Thin film deposition/Multisource PVD|Cryofox PVD co-sputter/evaporation]]. During the sputter deposition oxygen is added to the chamber resulting in aluminium oxide on the sample | ||
*[[Specific_Process_Knowledge/Thin_film_deposition/ALD_Picosun_R200/Al2O3_deposition_using_ALD|Al<sub>2</sub>O<sub>3</sub> deposition using ALD]] | |||
*[[Specific Process Knowledge/Thin film deposition/Lesker|Lesker Sputter System]] | *[[Specific Process Knowledge/Thin film deposition/Lesker|Lesker Sputter System]] | ||
*[[ | *[[Specific Process Knowledge/Thin film deposition/Multisource PVD|Cryofox PVD co-sputter/evaporation]] | ||
==Comparison of the methods for deposition of Titanium Oxide== | ==Comparison of the methods for deposition of Titanium Oxide== |
Revision as of 11:13, 7 September 2015
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Deposition of aluminium oxide
Aluminium oxide (Alumina, Al2O3 ) can be deposited by use of ALD (atomic layer deposition) or by a sputter technique in the Lesker Sputter System or the Cryofox PVD co-sputter/evaporation. During the sputter deposition oxygen is added to the chamber resulting in aluminium oxide on the sample
Comparison of the methods for deposition of Titanium Oxide
Sputter technique using IBE/IBSD Ionfab300 | Sputter System Lesker | III-V Dielectric evaporator | ALD Picosun 200 | |
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Stoichiometry |
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Film Thickness |
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Deposition rate |
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Step coverage |
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Process Temperature |
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More info on TiO2 |
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Substrate size |
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Allowed materials |
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