Specific Process Knowledge/Thermal Process/Furnace: Multipurpose annealing: Difference between revisions
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|style="background:LightGrey; color:black"|Gasses on the system | |style="background:LightGrey; color:black"|Gasses on the system | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*N<sub>2</sub>: 20 | *N<sub>2</sub>: 20 slm | ||
*O<sub>2</sub>: 10 | *O<sub>2</sub>: 10 slm | ||
*H<sub>2</sub>: 5 | *H<sub>2</sub>: 5 slm(max 2 slm for vacuum processes) | ||
*N<sub>2</sub>-H<sub>2</sub> mix: 10 | *N<sub>2</sub>-H<sub>2</sub> mix: 10 slm | ||
|- | |- | ||
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Substrates | !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Substrates | ||