Specific Process Knowledge/Thermal Process: Difference between revisions
| Line 22: | Line 22: | ||
*[[/BCB Curing Oven|BCB Curing oven]] - ''For resist curing and metal alloying'' | *[[/BCB Curing Oven|BCB Curing oven]] - ''For resist curing and metal alloying'' | ||
*[[/ATV furnace|ATV furnace]] - ''For annealing and resist pyrolysis'' | *[[/ATV furnace|ATV furnace]] - ''For annealing and resist pyrolysis'' | ||
*[[/Furnace: Multipurpose annealing |Furnace: Multipurpose annealing ]] - ''For annealing and resist pyrolysis'' | |||
*[[/Resist Pyrolysis Furnace|Resist Pyrolysis furnace]] - ''For pyrolysis of different resist layers'' | *[[/Resist Pyrolysis Furnace|Resist Pyrolysis furnace]] - ''For pyrolysis of different resist layers'' | ||
*[[/D4 III-V Oven|III-V Oven (D4)]] - ''For oxidation of Al<sub>x</sub>GaAs layers.'' | *[[/D4 III-V Oven|III-V Oven (D4)]] - ''For oxidation of Al<sub>x</sub>GaAs layers.'' | ||