Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
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| style="background:LightGrey; color:black"|Allowed materials | | style="background:LightGrey; color:black"|Allowed materials | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*All cleanroom materials | *All cleanroom materials except copper and steel | ||
*Dedicated 2inch chuck for III-V materials | *Dedicated 2inch chuck for III-V materials | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*All cleanroom materials except copper and steel | |||
*Dedicated chuck for III-V materials | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*All cleanroom materials except III-V materials | *All cleanroom materials except III-V materials, copper, and steel | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*III-V compounds | *III-V compounds | ||