Specific Process Knowledge/Lithography/Coaters/Spin Coater: RCD8 processing: Difference between revisions
| Line 31: | Line 31: | ||
**1.2 ml/s @ 0.1 bar | **1.2 ml/s @ 0.1 bar | ||
**2.4 ml/s @ 0.18 bar | **2.4 ml/s @ 0.18 bar | ||
==Edge bead removal== | |||
Observed dispense rates of PGMEA (uncertainty from measurements ~0.1 ml/s) for different tip sizes: | |||
*'''Red (0.010"):''' | |||
**0.2 ml/s @ 0.1 bar | |||
**0.25 ml/s @ 0.2 bar | |||
*'''Purple (0.020"):''' | |||
**0.3 ml/s @ 0.1 bar | |||
**0.65 ml/s @ 0.2 bar | |||
*'''Grey (0.047"):''' | |||
**~2.5 ml/s @ 0.1 bar | |||
=Standard recipes= | =Standard recipes= | ||