Specific Process Knowledge/Thin film deposition/Deposition of Silicon Oxide/Deposition of Silicon Oxide using PECVD: Difference between revisions
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=Recipes on PECVD2 for deposition of silicon oxides= | =Recipes on PECVD2 for deposition of silicon oxides= | ||
==Quality control recipe== | ==Quality control recipe (recipe changed in June 2015)== | ||
{| border="1" cellspacing="2" cellpadding="2" colspan="3" | {| border="1" cellspacing="2" cellpadding="2" colspan="3" | ||
|bgcolor="#98FB98" |'''Quality Controle (QC) for PECVD2''' | |bgcolor="#98FB98" |'''Quality Controle (QC) for PECVD2''' | ||