Specific Process Knowledge/Lithography/Coaters/Spin Coater: RCD8 processing: Difference between revisions
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''Recipe names, process parameters, and test results:'' | ''Recipe names, process parameters, and test results:'' | ||
*'''1 DCH nLOF 2020 man disp 2.3um''' | *'''1 DCH nLOF 2020 man disp 2.3um''' <sup>1)</sup> | ||
Spin-off: 30 s at 2500 rpm. | Spin-off: 30 s at 2500 rpm. | ||
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|} | |} | ||
<sup>1)</sup> Not implemented yet. | |||
<br clear="all" /> | <br clear="all" /> | ||