Specific Process Knowledge/Lithography/Development: Difference between revisions
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===Process information=== | ===Process information=== | ||
Development time is strongly dependent on the SU-8 thickness. Here are some suggestions: | Development time is strongly dependent on the SU-8 thickness. Here are some suggestions: | ||
*2-5µm: 2 min. in "first"; 2 min. in "final" | *2-5µm: 2 min. in "first"; 2 min. in "final" | ||
*40µm: 5 min. in "first"; 5 min. in "final" | *40µm: 5 min. in "first"; 5 min. in "final" (however, 3 min. in "first" and 2 min. in "final" is sufficient) | ||
*180-250µm: 15 min. in "first"; 15 min. in "final" | *180-250µm: 15 min. in "first"; 15 min. in "final" | ||