Specific Process Knowledge/Lithography/Development: Difference between revisions
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(2.38% TMAH in water) | (2.38% TMAH in water) | ||
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!style="background:silver; color:black" align="center" valign="center" rowspan=" | !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Method | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"|Development | ||
|style="background:WhiteSmoke; color:black" align="center"| | |style="background:WhiteSmoke; color:black" align="center"| | ||
Spray/Puddle | Spray/Puddle | ||
|style="background:LightGrey; color:black"|Handling | |||
|style="background:WhiteSmoke; color:black" align="center"| | |||
Edge handling chuck or chip "basket" | |||
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!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Process parameters | !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Process parameters | ||