Specific Process Knowledge/Lithography/Coaters/Spin Coater: RCD8 processing: Difference between revisions
| Line 150: | Line 150: | ||
|9 points on one wafer, exclusion zone 5mm | |9 points on one wafer, exclusion zone 5mm | ||
|} | |} | ||
*'''1 DCH 5214E man disp 2.2um''' | *'''1 DCH 5214E man disp 2.2um''' | ||