Specific Process Knowledge/Lithography/Coaters/Spin Coater: RCD8 processing: Difference between revisions
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*'''1 DCH predispense''' | *'''1 DCH predispense''' | ||
0.2s dispense at cup (arm position 0mm). | 0.2s dispense at cup (arm position 0mm). | ||
==SU-8 2005== | |||
==SU-8 2075== | ==SU-8 2075== | ||
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<br clear="all" /> | <br clear="all" /> | ||
==AZ 4562== | |||
==AZ 5214E== | ==AZ 5214E== | ||
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<br clear="all" /> | <br clear="all" /> | ||
==AZ MiR 701== | |||
==AZ nLOF 2020== | |||
=Template recipes= | =Template recipes= | ||