Specific Process Knowledge/Lithography/Coaters/Spin Coater: RCD8 processing: Difference between revisions
Appearance
| Line 64: | Line 64: | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|Silicon with native oxide | |Silicon with native oxide | ||
|1. | |1.52µm | ||
|0.3% | |0.3% | ||
|21/4 2015 | |21/4 2015 | ||