Specific Process Knowledge/Lithography/Coaters/Spin Coater: RCD8 processing: Difference between revisions
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=Standard recipes= | =Standard recipes= | ||
==General== | ==General== | ||
*1 DCH Centering test | *'''1 DCH Centering test''' | ||
*1 DCH Chuck cleaning | 5s @ 100rpm; 5s @ 250rpm; 5s @ 500rpm. | ||
*1 DCH Gyrset cleaning | *'''1 DCH Chuck cleaning''' | ||
*1 DCH | 10s @ 100rpm; 1s @ 0rpm; 10s @ -30rpm; 20s @ 1500rpm. | ||
*'''1 DCH Gyrset cleaning''' | |||
Gyrset down; 10s @ 100rpm; 1s @ 0rpm; 10s @ -30rpm; 20s @ 1500rpm; Gyrset up. | |||
*'''1 DCH predispense''' | |||
0.2s dispense at cup (arm position 0mm). | |||
==SU-8== | ==SU-8== | ||