Specific Process Knowledge/Lithography/Coaters/Spin Coater: RCD8 processing: Difference between revisions
Appearance
| Line 35: | Line 35: | ||
*1 DCH Chuck cleaning | *1 DCH Chuck cleaning | ||
*1 DCH Gyrset cleaning | *1 DCH Gyrset cleaning | ||
*1 DCH predispecse | |||
==SU-8== | ==SU-8== | ||
*1 DCH SU8 2075 aut disp 75um | *1 DCH SU8 2075 aut disp 75um | ||