Specific Process Knowledge/Lithography/Coaters/Spin Coater: RCD8 processing: Difference between revisions
| Line 49: | Line 49: | ||
=Template recipes= | =Template recipes= | ||
==Manual dispense== | ==Manual dispense== | ||
*1 | *1 TMPLT man disp | ||
*1 | *1 TMPLT man disp spread | ||
*1 | *1 TMPLT man disp Gyrset | ||
*1 | *1 TMPLT man disp Gyrset sprd | ||
==Automatic dispense== | ==Automatic dispense== | ||
*1 TEMPLATE aut SU8 disp | *1 TEMPLATE aut SU8 disp | ||