Specific Process Knowledge/Lithography/Coaters/Spin Coater: RCD8 processing: Difference between revisions
| Line 36: | Line 36: | ||
*1 DCH Gyrset cleaning | *1 DCH Gyrset cleaning | ||
==SU-8== | ==SU-8== | ||
*1 DCH SU8 2075 | *1 DCH SU8 2075 aut disp 75um | ||
*1 DCH SU8 2075 | *1 DCH SU8 2075 man disp 75um | ||
==AZ 5214E== | ==AZ 5214E== | ||
*1 DCH 5214E | *1 DCH 5214E man disp 1_5um | ||
*1 DCH 5214E | *1 DCH 5214E man disp 2_2um | ||
*1 DCH 5214E | *1 DCH 5214E aut disp 1_5um | ||
*1 DCH 5214E | *1 DCH 5214E aut disp 2_2um | ||
=Template recipes= | =Template recipes= | ||