Specific Process Knowledge/Lithography/Coaters/Spin Coater: RCD8 processing: Difference between revisions
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=Template recipes= | =Template recipes= | ||
*1 TEMPLATE man dyn disp | ==Manual dispense== | ||
*1 TEMPLATE | *1 TEMPLATE man disp | ||
*1 TEMPLATE | *1 TEMPLATE man disp Gyrset | ||
*1 TEMPLATE | *1 TEMPLATE man disp spread | ||
*1 TEMPLATE man disp spread Gyrset | |||
==Manual dispense== | |||
*1 TEMPLATE aut dyn disp | |||
*1 TEMPLATE aut dyn disp Gyrset | |||
*1 TEMPLATE aut stat disp | |||
*1 TEMPLATE aut stat disp Gyrset | |||
*1 TEMPLATE aut stat disp spread | |||
*1 TEMPLATE aut stat disp spread Gyrset | |||