Specific Process Knowledge/Lithography/Coaters/Spin Coater: RCD8 processing: Difference between revisions
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=Standard recipes= | =Standard recipes= | ||
* | *1 DCH Centering test | ||
* 1 DCH Chuck cleaning | *1 DCH Chuck cleaning | ||
* 1 DCH Gyrset cleaning | *1 DCH Gyrset cleaning | ||
*1 DCH AZ5214E Mdisp 1_5um | |||
*1 DCH AZ5214E Mdisp 2_2um | |||
*1 DCH AZ5214E Adisp 1_5um | |||
*1 DCH AZ5214E Adisp 2_2um | |||
=Template recipes= | =Template recipes= | ||