Specific Process Knowledge/Lithography/Coaters/Spin Coater: RCD8 processing: Difference between revisions
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=Standard recipes= | =Standard recipes= | ||
* 1 DCH Centering test | |||
* 1 DCH Chuck cleaning | |||
* 1 DCH Gyrset cleaning | |||
=Template recipes= | =Template recipes= | ||
==1 TEMPLATE SU-8 Mdisp Gyrset== | ==1 TEMPLATE SU-8 Mdisp Gyrset== | ||