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Specific Process Knowledge/Lithography/Coaters/Spin Coater: RCD8 processing: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,528 edits
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Line 29: Line 29:
**1.2 ml/s @ 0.1 bar
**1.2 ml/s @ 0.1 bar
**2.4 ml/s @ 0.18 bar
**2.4 ml/s @ 0.18 bar
=Standard recipes=
==1 DCH Centering test==
==1 DCH Chuck cleaning==
==1 DCH Gyrset cleaning==


=Template recipes=
=Template recipes=
 
==1 TEMPLATE SU-8 Mdisp Gyrset==
==1 DCH SU-8 2075 ...==
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