Specific Process Knowledge/Lithography/Coaters/Spin Coater: RCD8 processing: Difference between revisions
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**1.2 ml/s @ 0.1 bar | **1.2 ml/s @ 0.1 bar | ||
**2.4 ml/s @ 0.18 bar | **2.4 ml/s @ 0.18 bar | ||
=Standard recipes= | |||