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Specific Process Knowledge/Lithography/Coaters/Spin Coater: RCD8 processing: Difference between revisions

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**1.2 ml/s @ 0.1 bar
**1.2 ml/s @ 0.1 bar
**2.4 ml/s @ 0.18 bar
**2.4 ml/s @ 0.18 bar
=Standard recipes=