Specific Process Knowledge/Lithography/Coaters/Spin Coater: RCD8 processing: Difference between revisions
| Line 26: | Line 26: | ||
*'''AZ 5214E:''' | *'''AZ 5214E:''' | ||
**1.2 ml/s @ 0.1 bar | **1.2 ml/s @ 0.1 bar | ||
**2.4 ml/s @ 0. | **2.4 ml/s @ 0.18 bar | ||
| Line 26: | Line 26: | ||
*'''AZ 5214E:''' | *'''AZ 5214E:''' | ||
**1.2 ml/s @ 0.1 bar | **1.2 ml/s @ 0.1 bar | ||
**2.4 ml/s @ 0. | **2.4 ml/s @ 0.18 bar | ||