Specific Process Knowledge/Lithography/Coaters/Spin Coater: RCD8 processing: Difference between revisions
| Line 20: | Line 20: | ||
Observed dispense rates: | Observed dispense rates: | ||
*SU-8 2075: | *'''SU-8 2075:''' | ||
**0.2 ml/s @ 1.0 bar | **0.2 ml/s @ 1.0 bar | ||
**0.5 ml/s @ 2.0 bar | **0.5 ml/s @ 2.0 bar | ||
**0.7 ml/s @ 3.0 bar | **0.7 ml/s @ 3.0 bar | ||
*AZ 5214E: | *'''AZ 5214E:''' | ||
**1.2 ml/s @ 0.1 bar | **1.2 ml/s @ 0.1 bar | ||
**2.4 ml/s @ 0.2 bar | **2.4 ml/s @ 0.2 bar | ||