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Specific Process Knowledge/Lithography/Coaters/Spin Coater: RCD8 processing: Difference between revisions

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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,528 edits
Line 20: Line 20:


Observed dispense rates:
Observed dispense rates:
*SU-8 2075: 0.5 ml/s @ 2.0 bar
*SU-8 2075:
*AZ 5214E: ml/s @ 0.1 bar
**0.2 ml/s @ 1.0 bar
**0.5 ml/s @ 2.0 bar
**0.7 ml/s @ 3.0 bar
*AZ 5214E:
**1.2 ml/s @ 0.1 bar
**2.4 ml/s @ 0.2 bar
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