Specific Process Knowledge/Lithography/Coaters: Difference between revisions
Appearance
| Line 115: | Line 115: | ||
*optional | *optional | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*optional (max. speed | *optional (max. speed 3000 rpm) | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*no | *no | ||