Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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==Manual Spinner (Polymers)== | ==Manual Spinner (Polymers)== | ||
[[Image:IMG 1179.JPG|300x300px|thumb|right|The Manual Spinner (Polymers): positioned in fumehood in C-1]] | [[Image:IMG 1179.JPG|300x300px|thumb|right|The Manual Spinner (Polymers): positioned in fumehood in C-1]] | ||
'''Feedback to this section''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Coaters#Manual_Spinner_(Polymers) click here]''' | '''Feedback to this section''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Coaters#Manual_Spinner_(Polymers) click here]''' | ||
[[Specific_Process_Knowledge/Lithography/Coaters#Coaters:_Comparison_Table|Coater comparison table]] | |||
Manual Spinner (Polymers), OPTIcoat SB20+, from ATMSSE is a resist spinning coater at Danchip which is dedicated for single wafers spinning of e-beam resist, the hot embossing/UV imprint polymers and SU8 resit mixed with color/nano particals. | Manual Spinner (Polymers), OPTIcoat SB20+, from ATMSSE is a resist spinning coater at Danchip which is dedicated for single wafers spinning of e-beam resist, the hot embossing/UV imprint polymers and SU8 resit mixed with color/nano particals. | ||