Specific Process Knowledge/Thin film deposition/Wordentec: Difference between revisions
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More information about deposition rates and surface roughness can be found by clicking on the different elements. | More information about deposition rates and surface roughness can be found by clicking on the different elements. | ||
===Wafer temperature=== | |||
==Equipment performance and and process related parameters Wordentec== | ==Equipment performance and and process related parameters Wordentec== | ||