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Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange: Difference between revisions

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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,569 edits
Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,569 edits
Line 306: Line 306:
| 35      <!-- platen power -->
| 35      <!-- platen power -->
! New      <!-- Showerhead -->
! New      <!-- Showerhead -->
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessD/NewProcessD | 2]]      <!-- link processes -->
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessD/NewProcessD | 4]]      <!-- link processes -->
| Large undercut  <!-- keywords -->
| Large undercut  <!-- keywords -->
|-
|-
Line 344: Line 344:
| 35      <!-- platen power -->
| 35      <!-- platen power -->
| New      <!-- Showerhead -->
| New      <!-- Showerhead -->
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessD/PrD02 | 2]]      <!-- link processes -->
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessD/PrD02 | 1]]      <!-- link processes -->
|  <!-- keywords -->
|  <!-- keywords -->
|-
|-
Line 363: Line 363:
| 35      <!-- platen power -->
| 35      <!-- platen power -->
| New      <!-- Showerhead -->
| New      <!-- Showerhead -->
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessD/PrD-3 | 2]]      <!-- link processes -->
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessD/PrD-3 | 1]]      <!-- link processes -->
|  <!-- keywords -->
|  <!-- keywords -->
|-
|-
Line 382: Line 382:
| 35      <!-- platen power -->
| 35      <!-- platen power -->
| New      <!-- Showerhead -->
| New      <!-- Showerhead -->
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessD/PrD-4 | 2]]      <!-- link processes -->
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessD/PrD-4 | 1]]      <!-- link processes -->
|   <!-- keywords -->
| Best one so far!  <!-- keywords -->
|-
|-
|}
|}
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