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Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,569 edits
Line 181: Line 181:
! width="100" | Key words
! width="100" | Key words
|-
|-
! rowspan="4" | Process D    <!-- recipe name -->
! rowspan="5" | Process D    <!-- recipe name -->
! Original <!-- step -->
! Original <!-- step -->
| 0      <!-- chiller temp -->
| 0      <!-- chiller temp -->
Line 220: Line 220:
|  <!-- keywords -->
|  <!-- keywords -->
|-
|-
! Original <!-- step -->
! New Process D <!-- step -->
| 0      <!-- chiller temp -->
! 1      <!-- dep time -->
| 20      <!-- dep pressure -->
| 150      <!-- C4F8 flow -->
| 0      <!-- SF6 flow -->
| 0    <!-- O2 flow -->
| 2000      <!-- coil power -->
| 3      <!-- etch time -->
| 26      <!-- etch pressure -->
| 0      <!-- C4F8 flow -->
| 275      <!-- SF6 flow -->
| 5      <!-- O2 flow -->
| 2500      <!-- coil power -->
| 35      <!-- platen power -->
! New      <!-- Showerhead -->
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessD/NewProcessD | 2]]      <!-- link processes -->
|  <!-- keywords -->
|-
! PrD01 <!-- step -->
| 0      <!-- chiller temp -->
| 1      <!-- dep time -->
| 20      <!-- dep pressure -->
| 150      <!-- C4F8 flow -->
| 0      <!-- SF6 flow -->
| 0    <!-- O2 flow -->
| 2000      <!-- coil power -->
! 2.4      <!-- etch time -->
| 26      <!-- etch pressure -->
| 0      <!-- C4F8 flow -->
| 275      <!-- SF6 flow -->
| 5      <!-- O2 flow -->
| 2500      <!-- coil power -->
| 35      <!-- platen power -->
| New      <!-- Showerhead -->
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessD/PrD01 | 2]]      <!-- link processes -->
|  <!-- keywords -->
|-
! PrD02 <!-- step -->
| 0      <!-- chiller temp -->
| 0      <!-- chiller temp -->
! 2       <!-- dep time -->
! 1.1       <!-- dep time -->
| 20      <!-- dep pressure -->
| 20      <!-- dep pressure -->
| 150      <!-- C4F8 flow -->
| 150      <!-- C4F8 flow -->
Line 235: Line 273:
| 2500      <!-- coil power -->
| 2500      <!-- coil power -->
| 35      <!-- platen power -->
| 35      <!-- platen power -->
! New      <!-- Showerhead -->
| New      <!-- Showerhead -->
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessD/original | 1]]      <!-- link processes -->
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessD/PrD02 | 2]]      <!-- link processes -->
|  <!-- keywords -->
|-
! PrD-3 <!-- step -->
| 0      <!-- chiller temp -->
| 1      <!-- dep time -->
| 20      <!-- dep pressure -->
| 150      <!-- C4F8 flow -->
| 0      <!-- SF6 flow -->
| 0    <!-- O2 flow -->
| 2000      <!-- coil power -->
| 2.5      <!-- etch time -->
| 26      <!-- etch pressure -->
| 0      <!-- C4F8 flow -->
| 275      <!-- SF6 flow -->
| 5      <!-- O2 flow -->
| 2500      <!-- coil power -->
| 35      <!-- platen power -->
| New      <!-- Showerhead -->
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessD/PrD-3 | 2]]      <!-- link processes -->
|  <!-- keywords -->
|  <!-- keywords -->
|-
|-
! Original <!-- step -->
! PrD-4 <!-- step -->
| 0      <!-- chiller temp -->
| 0      <!-- chiller temp -->
! 1      <!-- dep time -->
| 1      <!-- dep time -->
| 20      <!-- dep pressure -->
| 20      <!-- dep pressure -->
| 150      <!-- C4F8 flow -->
| 150      <!-- C4F8 flow -->
Line 247: Line 304:
| 0    <!-- O2 flow -->
| 0    <!-- O2 flow -->
| 2000      <!-- coil power -->
| 2000      <!-- coil power -->
| 3     <!-- etch time -->
! 2.2     <!-- etch time -->
| 26      <!-- etch pressure -->
| 26      <!-- etch pressure -->
| 0      <!-- C4F8 flow -->
| 0      <!-- C4F8 flow -->
| 275      <!-- SF6 flow -->
| 275      <!-- SF6 flow -->
| 15     <!-- O2 flow -->
| 5     <!-- O2 flow -->
| 2500      <!-- coil power -->
| 2500      <!-- coil power -->
| 35      <!-- platen power -->
| 35      <!-- platen power -->
! New      <!-- Showerhead -->
| New      <!-- Showerhead -->
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessD/NewPrD | 1]]      <!-- link processes -->
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessD/PrD-4 | 2]]      <!-- link processes -->
|  <!-- keywords -->
|  <!-- keywords -->
|-
|-
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