Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange: Difference between revisions
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= Comparison of switched processes = | = Comparison of switched processes = | ||
== Process A == | |||
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|- | |- | ||
|} | |} | ||
== Process B == | |||
{| border="1" cellpadding="1" cellspacing="0" style="text-align:center;" | {| border="1" cellpadding="1" cellspacing="0" style="text-align:center;" | ||
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== Polysilicon etch == | |||