Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange: Difference between revisions
| Line 42: | Line 42: | ||
| S003900 | | S003900 | ||
| 4" wafer | | 4" wafer | ||
| | | | ||
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| S00XXX | | S00XXX | ||
| Wafer centre | | Wafer centre | ||