Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange: Difference between revisions
| Line 75: | Line 75: | ||
! Coil | ! Coil | ||
! Platen | ! Platen | ||
! Showerhead | |||
! Runs | ! Runs | ||
! width="100" | Key words | ! width="100" | Key words | ||
| Line 95: | Line 95: | ||
| 400 <!-- coil power --> | | 400 <!-- coil power --> | ||
| 40 <!-- platen power --> | | 40 <!-- platen power --> | ||
! Old <!-- Showerhead --> | |||
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/polySi/Cduv | 1]] <!-- link processes --> | | [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/polySi/Cduv | 1]] <!-- link processes --> | ||
| Slightly over-etching to ensure complete absence of grass <!-- keywords --> | | Slightly over-etching to ensure complete absence of grass <!-- keywords --> | ||
| Line 114: | Line 114: | ||
| 400 <!-- coil power --> | | 400 <!-- coil power --> | ||
| 40 <!-- platen power --> | | 40 <!-- platen power --> | ||
! New <!-- Showerhead --> | |||
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/polySi/Cduv | 1]] <!-- link processes --> | | [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/polySi/Cduv | 1]] <!-- link processes --> | ||
| <!-- keywords --> | | <!-- keywords --> | ||
| Line 133: | Line 133: | ||
| 400 <!-- coil power --> | | 400 <!-- coil power --> | ||
| 40 <!-- platen power --> | | 40 <!-- platen power --> | ||
! New <!-- Showerhead --> | |||
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/polySi/Cpoly1 | 1]] <!-- link processes --> | | [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/polySi/Cpoly1 | 1]] <!-- link processes --> | ||
| Very aggressive, unusable <!-- keywords --> | | Very aggressive, unusable <!-- keywords --> | ||
| Line 152: | Line 152: | ||
| 400 <!-- coil power --> | | 400 <!-- coil power --> | ||
| 40 <!-- platen power --> | | 40 <!-- platen power --> | ||
! New <!-- Showerhead --> | |||
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/polySi/Cpoly2 | 1]] <!-- link processes --> | | [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/polySi/Cpoly2 | 1]] <!-- link processes --> | ||
| <!-- keywords --> | | <!-- keywords --> | ||
| Line 171: | Line 171: | ||
| 400 <!-- coil power --> | | 400 <!-- coil power --> | ||
| 40 <!-- platen power --> | | 40 <!-- platen power --> | ||
! New <!-- Showerhead --> | |||
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/polySi/Cpoly3 | 1]] <!-- link processes --> | | [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/polySi/Cpoly3 | 1]] <!-- link processes --> | ||
| <!-- keywords --> | | <!-- keywords --> | ||
| Line 190: | Line 190: | ||
| 400 <!-- coil power --> | | 400 <!-- coil power --> | ||
| 40 <!-- platen power --> | | 40 <!-- platen power --> | ||
! New <!-- Showerhead --> | |||
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/polySi/Cpoly4 | 1]] <!-- link processes --> | | [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/polySi/Cpoly4 | 1]] <!-- link processes --> | ||
| <!-- keywords --> | | <!-- keywords --> | ||
| Line 209: | Line 209: | ||
| 400 <!-- coil power --> | | 400 <!-- coil power --> | ||
| 40 <!-- platen power --> | | 40 <!-- platen power --> | ||
! New <!-- Showerhead --> | |||
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/polySi/Cpoly5 | 1]] <!-- link processes --> | | [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/polySi/Cpoly5 | 1]] <!-- link processes --> | ||
| <!-- keywords --> | | <!-- keywords --> | ||
|- | |- | ||
|} | |} | ||