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Specific Process Knowledge/Lithography/Coaters: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,528 edits
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|style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters#KS Spinner|KS Spinner]]</b>
|style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters#KS Spinner|KS Spinner]]</b>
|style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters#Spin Track 1 + 2|Spin Track 1 + 2]]</b>
|style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters#Spin Track 1 + 2|Spin Track 1 + 2]]</b>
|style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters#Specific_Process_Knowledge/Lithography/Coaters#Manual_Spinner_.28Polymers.29|Manual Spinner (Polymers)]]</b>
|style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters#Manual Spinner 1|Manual Spinner 1]]</b>
|style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters#Manual Spinner 1|Manual Spinner 1]]</b>
|style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters#Spin coater: Manual Labspin|Spin coater: Manual labspin]]</b>
|style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters#Spin coater: Manual Labspin|Spin coater: Manual labspin]]</b>
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**AZ nLOF 2020 resist
**AZ nLOF 2020 resist
*Post-exposure baking at 110°C
*Post-exposure baking at 110°C
|style="background:WhiteSmoke; color:black"|
*Coating of
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*Coating of all resist
*Coating of all resist
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|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* Cassette-to-cassette
* Cassette-to-cassette
|colspan="2" align="center"|Single substrate
|colspan="3" align="center"|Single substrate
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* Can handle almost any sample size and shape
* Can handle almost any sample size and shape
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* PGMEA for backside rinse and edge-bead removal
* PGMEA for backside rinse and edge-bead removal
* PGMEA for spinner bowl cleaning and vapor tip bath
* PGMEA for spinner bowl cleaning and vapor tip bath
|colspan="2" rowspan="2" align="center"|Only manual dispense
|colspan="2" rowspan="3" align="center"|Only manual dispense
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* No permanent media
* No permanent media
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|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*10 - 9990 rpm
*10 - 9990 rpm
|style="background:WhiteSmoke; color:black"|
*?? rpm
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*100-5000 rpm
*100-5000 rpm
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|style="background:LightGrey; color:black"|Gyrset
|style="background:LightGrey; color:black"|Gyrset
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*optinal
*optional
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*optinal
*optional (max. speed 3000rpm)
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*no
*no
|style="background:WhiteSmoke; color:black"|
*optional
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*no
*no
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*100 mm wafers
*100 mm wafers
*150 mm wafers (tool change required)
*150 mm wafers (tool change required)
|style="background:WhiteSmoke; color:black"|
*50 mm wafers
*100 mm wafers
*150 mm wafers
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*50 mm wafers
*50 mm wafers
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|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*1-25
*1-25
|style="background:WhiteSmoke; color:black"|
*1
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*1
*1
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*Silicon  
*Silicon  
*Glass
*Glass
|style="background:WhiteSmoke; color:black"|
*??
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*All cleanroom materials
*All cleanroom materials
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