Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy/AFM Icon Acceptance: Difference between revisions
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==Acceptance tests done== | ==Acceptance tests done== | ||
===Noise | ===Noise tests=== | ||
====Sensor noise==== | |||
Tappingmode, OTESPA-R3 probe used. <br> | |||
First we made a false engage (scanning in air): | |||
Turn off gain 0 0 <br> | |||
Z range 0.2my <br> | |||
Scan size 0.01nm <br> | |||
We saw some 50Hz noise (electrical - or maybe pumps): Rq 15 pm (specs 35pm) <br> | |||
[[File:SensorNoise.jpg|400px]] <br> | |||
====System noise==== | |||
Noise on sample: scan size 0.1nm | |||
we started with 1my scan size to optimize the scan. | |||
2.43Hz | |||
256 lines | |||
Z range at 2my to get sub nanometer resolution in Z | |||
Rq: 54,5pm (plade vibrator koerte udenfor) | |||
Rq: 23pm uden vibrator koerende + ro og med aaben hood. | |||
Rq:71pm uden vibrator koerende + ro og med lukket hood | |||
===Roughness=== | ===Roughness=== | ||