Specific Process Knowledge/Doping: Difference between revisions
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Ion implantation cannot be done at Danchip. IBS offers ion-beam implantation as a service. | Ion implantation cannot be done at Danchip. IBS offers ion-beam implantation as a service. | ||
See more at the homepage of IBS: http://www.ion-beam-services.com/about_us.htm | See more at the homepage of IBS: http://www.ion-beam-services.com/about_us.htm | ||
When wafers return from Ion implantation they need a clean before entering in the cleanroom and activation and redistribution of the dopants are done by a high temperature anneal in the high temperature furnaces or by rapid thermal anneal. | |||