Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy/Workspaces: Difference between revisions
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!Roughness measurements | !Roughness measurements | ||
!Topographic measurements with no steep steps | !Topographic measurements with no steep/abrupt steps | ||
!Steep steps but no high aspect ratio | !Steep/abrupt steps but no high aspect ratio | ||
!High aspect ratio measurements | !High aspect ratio measurements | ||
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!Recommended mode | !Recommended mode | ||
|Roughness measurement can be done in both Contact, Tapping and ScanAsyst mode. We recommend '''ScanAsyst mode''' because of less chance of (non-uniform) deformation of the sample and less tip wear - and because of ease of use. | |Roughness measurement can be done in both Contact, Tapping and ScanAsyst mode. We recommend '''ScanAsyst mode''' because of less chance of (non-uniform) deformation of the sample and less tip wear - and because of ease of use. | ||
|For Topographic measurements with no steep steps we also recommend '''ScanAsyst mode''' due to less chance of (non-uniform) deformation of the sample and less tip wear - and because of ease of use. | |For Topographic measurements with no steep/abrupt steps we also recommend '''ScanAsyst mode''' due to less chance of (non-uniform) deformation of the sample and less tip wear - and because of ease of use. | ||
|For Steep steps but no high aspect ratio structures we still recommend '''ScanAsyst mode''' due to ease of use but it will scan slower than Tapping mode. | |For Steep/abrupt steps but no high aspect ratio structures we still recommend '''ScanAsyst mode''' due to ease of use but it will scan slower than Tapping mode. | ||
|For High aspect ratio measurements we recommend Tapping mode. There is not yet a ScanAsyst probe developed for high aspect ratio. Therefor we recommend '''Tapping mode'''. | |For High aspect ratio measurements we recommend Tapping mode. There is not yet a ScanAsyst probe developed for high aspect ratio. Therefor we recommend '''Tapping mode'''. | ||
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Revision as of 14:51, 22 October 2014
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What scanning mode, experiment/workspace and probe should I select
| Roughness measurements | Topographic measurements with no steep/abrupt steps | Steep/abrupt steps but no high aspect ratio | High aspect ratio measurements | |
|---|---|---|---|---|
| Recommended mode | Roughness measurement can be done in both Contact, Tapping and ScanAsyst mode. We recommend ScanAsyst mode because of less chance of (non-uniform) deformation of the sample and less tip wear - and because of ease of use. | For Topographic measurements with no steep/abrupt steps we also recommend ScanAsyst mode due to less chance of (non-uniform) deformation of the sample and less tip wear - and because of ease of use. | For Steep/abrupt steps but no high aspect ratio structures we still recommend ScanAsyst mode due to ease of use but it will scan slower than Tapping mode. | For High aspect ratio measurements we recommend Tapping mode. There is not yet a ScanAsyst probe developed for high aspect ratio. Therefor we recommend Tapping mode. |
| Recommended probes | ScanAsyst in air | ScanAsyst in air | ScanAsyst in air for ScanAsyst mode
TAP300Al-G for Tapping mode |
AR5T-NCH
FIB6 |
| Recommended experiment/Workspace |
ScanAsyst in air - roughness (<10nm) |
ScanAsyst in air - standards |
ScanAsyst in air - steep steps | Tapping mode in air 300nm (for steps <~1µm)
Tappping mode in air 6µm (for steps >1~µm) |