Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy/Workspaces: Difference between revisions
Appearance
| Line 35: | Line 35: | ||
|-style="background:LightGrey; color:black" | |-style="background:LightGrey; color:black" | ||
!Recommended probes | !Recommended probes | ||
| | |ScanAsyst in air | ||
|ScanAsyst in air | |||
|ScanAsyst in air for ScanAsyst mode | |||
| | TAP300Al-G for tapping mode | ||
|AR5T-NCH | |||
FIB6 | |||
| | |||
|- | |- | ||
| Line 49: | Line 47: | ||
!Recommended experiment/Workspace | !Recommended experiment/Workspace | ||
| | | | ||
'''ScanAsyst in air - roughness (<10nm)''' | |||
| | | | ||
'''ScanAsyst in air - standards''' | |||
|'''ScanAsyst in air - steep steps''' | |||
|'''Tapping mode in air 300nm''' (for steps <~1µm) | |||
'''Tappping mode in air 6µm''' (for steps >1~µm) | |||
|- | |- | ||