Specific Process Knowledge/Doping: Difference between revisions
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!Dopant | !Dopant | ||
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*Phospor | *Phospor (POCL) | ||
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*Boron | *Boron | ||
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*Phosphor | *Phosphor (PH<sub>3</sub>) | ||
*Boron | *Boron (B<sub>2</sub>H<sub>6</sub>) | ||
*Germane | *Germane (GeH<sub>4</sub>) | ||
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*Phosphor | *Phosphor (PH<sub>3</sub>) | ||
*Boron | *Boron (B<sub>2</sub>H<sub>6</sub> or BCl<sub>3</sub>) | ||
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