Specific Process Knowledge/Doping: Difference between revisions
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!Temperature | !Temperature<sup>{{fn|1}}</sup> | ||
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*900°C - 1100°C | *900°C - 1100°C | ||
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< | <sup>{{fn|1}}</sup> In most cases you need a high temperature step to drive in and redistribute the dopant in the material. This is done at 800°C - 1100°C in either high temperature annealing furnaces or by rapid thermal annealing. | ||
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