Specific Process Knowledge/Doping: Difference between revisions
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!'''Allowed materials''' | !'''Allowed materials''' | ||
| | | | ||
* | *Silicon | ||
* | *Poly/amorphous silicon | ||
*Oxide | |||
*Nitride | |||
| | | | ||
* | *Silicon | ||
* | *Poly/amorphous silicon | ||
* | *Oxide | ||
*Nitride | |||
| | | | ||
* | *Silicon | ||
* | *Poly/amorphous silicon | ||
* | *Oxide | ||
*Nitride | |||
| | | | ||
* | *Silicon | ||
* | *Poly/amorphous silicon | ||
* | *Oxide | ||
*Nitride | |||
|- | |- | ||
|} | |} | ||